Advanced Specialty Gas Equipment

MASS FLOW SYSTEMS
Control Modules—Specification

Control Module Mass Flow

Table llI, Specifications—Mass Flow Control Modules

  Fast Response
Module Models 1FRC–17FRC
Fast Response
Module Models 18FRC–19FRC
Fast Response
Module Models 20FRC–24FRC
High Pressure
Module Models 6HPC–16HPC
Operating Pressure Range 570 torr to 1500 psig 570 torr to 1500 psig 570 torr to 1500 psig 570 torr to 4500 psig
Operating Temperature Range 40°F to 150°F 40°F to 150°F 40°F to 150°F 40°F to 150°F
Maximum Flow Capacity See Table V See Table V See Table V See Table V
Minimum Flow Capacity 2% of max.
flow capacity
2% of max.
flow capacity
2% of max.
flow capacity
2% of max.
flow capacity
Accuracy ± 1% of full scale at calibrated conditions
± 1% of full scale at calibrated conditions ± 1% of full scale at calibrated conditions ± 1% of full scale at calibrated conditions
Repeatability ± 0.25% of reading ± 0.25% of reading ± 0.25% of reading ± 0.25% of reading
Response Time 3 seconds max.¹ 3 seconds max.¹ 3 seconds max.¹ 15 seconds max.¹
Maximum Pressure Drop 50 psi differential 50 psi differential 290 psi differential 50 psi differential
Minimum Pressure Drop 5 psi differential 10 psi differential 22 psi differential 5 psi differential
Mounting Attitude Sensitivity ± 0.5% full scale² ± 0.5% full scale² ± 0.5% full scale² ± 0.25% full scale²
Inlet and Outlet Connections 1/4" compression³ 3/8" compression³ 1/2" NPT female5 1/4" compression³
Leak Integrity 1 x 10–9atm.
scc/sec Helium
1 x 10–9atm.
scc/sec Helium
1 x 10–9atm.
scc/sec Helium
1 x 10–9atm.
scc/sec Helium
Dimensions (inches) 5.48 x 1.48 x 5.024 5.68 x 1.75 x 5.824 7.00 x 3.30 x 7.9 4.92 x 1.00 x 5.054
Weight (approximate) 2.5 lbs. 3 lbs. 15 lbs. 1.5 lbs.
Electrical Connection 15-Pin Type D
male connector
15-Pin Type D
male connector
15-Pin Type D
male connector
15-Pin Type D
male connector
Power Requirements +15 VDC at 35mA
-15 VDC at 180mA
+15 VDC at 350mA
-15 VDC at 350mA
+15 VDC at 35mA
-15 VDC at 180mA
+15 VDC at 215mA
-15 VDC at 15mA
Flow Output Signal 0–5 VDC
into 2000 ohm
(or greater) load
0–5 VDC
into 2000 ohm
(or greater) load
0–5 VDC
into 2000 ohm
(or greater) load
0–5 VDC
into 1000 ohm
(or greater) load
Command Signal 0–5 VDC 0–5 VDC 0–5 VDC 0–5 VDC
1. To within 2% of set point. Response time specification shown is with "soft start" feature disabled. With soft start enabled, response time will increase by a factor of approximately 4 to 5 times stated specification. Modules are shipped with this feature disabled.
2. Maximum deviation from stated accuracy specification.
3. VCR® connections are available on special order.
4. Dimensions include compression end connectors.
5. 1" or 11⁄2" NPT or 1⁄2", 3⁄4" or 1" compression connections available on special order.