Advanced Specialty Gas Equipment Control Modules -- Materials of Construction and Selection Guide

MASS FLOW SYSTEMS
Control Modules—Materials of Construction and Selection Guide

Table lV, Materials of Construction—Mass Flow Control Modules(All Models)
Metal Parts Exposed to Gas: Type 316 Stainless Steel
Seals: Viton® (Buna-N or Kalrez® Seals available on special order)

Table V, Selection Guide—Mass Flow Control Modules

Maximum Flow Capacity (Minimum Capacity = 2% of Maximum)
		Air, Argon, Carbon Monoxide Deuterium, Helium, Hydrogen, Krypton, Neon, Nitrogen, Oxygen, Xenon	Ammonia, Arsine, Carbon Dioxide, Chlorine, Hydrogen Chloride, Hydrogen Sulfide, Methane, Nitrous Oxide, Phosphine	Acetylene, Ethane, Ethylene, Silane, Sulfur Dioxide	Dichlorosilane, Halocarbon 12, Halocarbon 13, Halocarbon 13B1, Halocarbon 14, Isobutane, Propane, Propylene, Sulfur Hexafluoride


Model Numbers
Fast Response Modules	High Pressure Modules
1FRC	—	5 sccm*	—	—	—
2FRC	—	10 sccm*	5 sccm*	—	—
3FRC	—	20 sccm	10 sccm*	5 sccm*	—
4FRC	—	30 sccm	20 sccm	10 sccm*	5 sccm*
5FRC	—	50 sccm	30 sccm	20 sccm	10 sccm*
6FRC	6HPC	100 sccm	50 sccm	30 sccm	20 sccm
7FRC	7HPC	200 sccm	100 sccm	50 sccm	30 sccm
8FRC	8HPC	300 sccm	200 sccm	100 sccm	50 sccm
9FRC	9HPC	500 sccm	300 sccm	200 sccm	100 sccm
10FRC	10HPC	1000 sccm	500 sccm	300 sccm	200 sccm
11FRC	11HPC	2000 sccm	1000 sccm	500 sccm	300 sccm
12FRC	12HPC	3000 sccm	2000 sccm	1000 sccm	500 sccm
13FRC	13HPC	5000 sccm	3000 sccm	2000 sccm	1000 sccm
14FRC	14HPC	10 slpm	5000 sccm	3000 sccm	2000 sccm
15FRC	15HPC	15 slpm	10 slpm	5000 sccm	3000 sccm
16FRC	16HPC	20 slpm	15 slpm	10 slpm	5000 sccm
17FRC	—	30 slpm	20 slpm	15 slpm	10 slpm
18FRC	—	50 slpm	30 slpm	20 slpm	15 slpm
19FRC	—	100 slpm	50 slpm	30 slpm	20 slpm
20FRC	—	150 slpm	100 slpm	50 slpm	30 slpm
21FRC	—	200 slpm	150 slpm	100 slpm	50 slpm
22FRC	—	300 slpm	200 slpm	150 slpm	100 slpm
23FRC	—	500 slpm	300 slpm	200 slpm	150 slpm
24FRC	—	1000 slpm	500 slpm	300 slpm	200 slpm

* Mass Flow Control Modules ordered for flow capacities of 10 sccm or less carry an additional low flow calibration charge. (See Optional Equipment Table)
Minimum flow range available for hydrogen and helium service is 20 sccm.
When ordering Mass Flow Control Modules, specify gas service, operating pressure, operating temperature and flow range for each module.
Calibration for one service gas (or gas mixture) at pressures up to 200 psig on models 1FRC–17FRC, 90 psig on models 18FRC–24FRC and 4500 psig on models 6HPC–16HPC is included. Calibrations on models 1FRC–17FRC for pressures above 200 psig and above 90 psig on models 18FRC–19FRC are available as an option.
(See Optional Equipment Table)
One 25 ft. interconnecting cable will be included with each Mass Flow Control Module ordered.

Optional Equipment

Optional Equipment Table