Advanced Specialty Gas Equipment

MASS FLOW SYSTEMS
Control Modules—Materials of Construction and Selection Guide

Table lV, Materials of Construction—Mass Flow Control Modules(All Models)
Metal Parts Exposed to Gas: Type 316 Stainless Steel
Seals: Viton® (Buna-N or Kalrez® Seals available on special order)

Table V, Selection Guide—Mass Flow Control Modules

Maximum Flow Capacity (Minimum Capacity = 2% of Maximum)
  Air, Argon,
Carbon Monoxide
Deuterium, Helium,
Hydrogen, Krypton,
Neon, Nitrogen,
Oxygen, Xenon
Ammonia, Arsine,
Carbon Dioxide,
Chlorine,
Hydrogen Chloride,
Hydrogen Sulfide,
Methane,
Nitrous Oxide,
Phosphine
Acetylene, Ethane,
Ethylene, Silane,
Sulfur Dioxide
Dichlorosilane,
Halocarbon 12,
Halocarbon 13,
Halocarbon 13B1,
Halocarbon 14,
Isobutane, Propane,
Propylene,
Sulfur Hexafluoride
 
 
Model Numbers
Fast
Response
Modules
High
Pressure
Modules
1FRC 5 sccm*
2FRC 10 sccm* 5 sccm*
3FRC 20 sccm 10 sccm* 5 sccm*
4FRC 30 sccm 20 sccm 10 sccm* 5 sccm*
5FRC 50 sccm 30 sccm 20 sccm 10 sccm*
6FRC 6HPC 100 sccm 50 sccm 30 sccm 20 sccm
7FRC 7HPC 200 sccm 100 sccm 50 sccm 30 sccm
8FRC 8HPC 300 sccm 200 sccm 100 sccm 50 sccm
9FRC 9HPC 500 sccm 300 sccm 200 sccm 100 sccm
10FRC 10HPC 1000 sccm 500 sccm 300 sccm 200 sccm
11FRC 11HPC 2000 sccm 1000 sccm 500 sccm 300 sccm
12FRC 12HPC 3000 sccm 2000 sccm 1000 sccm 500 sccm
13FRC 13HPC 5000 sccm 3000 sccm 2000 sccm 1000 sccm
14FRC 14HPC 10 slpm 5000 sccm 3000 sccm 2000 sccm
15FRC 15HPC 15 slpm 10 slpm 5000 sccm 3000 sccm
16FRC 16HPC 20 slpm 15 slpm 10 slpm 5000 sccm
17FRC 30 slpm 20 slpm 15 slpm 10 slpm
18FRC 50 slpm 30 slpm 20 slpm 15 slpm
19FRC 100 slpm 50 slpm 30 slpm 20 slpm
20FRC 150 slpm 100 slpm 50 slpm 30 slpm
21FRC 200 slpm 150 slpm 100 slpm 50 slpm
22FRC 300 slpm 200 slpm 150 slpm 100 slpm
23FRC 500 slpm 300 slpm 200 slpm 150 slpm
24FRC 1000 slpm 500 slpm 300 slpm 200 slpm
* Mass Flow Control Modules ordered for flow capacities of 10 sccm or less carry an additional low flow calibration charge. (See Optional Equipment Table)
Minimum flow range available for hydrogen and helium service is 20 sccm.
When ordering Mass Flow Control Modules, specify gas service, operating pressure, operating temperature and flow range for each module.
Calibration for one service gas (or gas mixture) at pressures up to 200 psig on models 1FRC–17FRC, 90 psig on models 18FRC–24FRC and 4500 psig on models 6HPC–16HPC is included. Calibrations on models 1FRC–17FRC for pressures above 200 psig and above 90 psig on models 18FRC–19FRC are available as an option.
(See Optional Equipment Table)
One 25 ft. interconnecting cable will be included with each Mass Flow Control Module ordered.

Optional Equipment

Optional Equipment Table