Advanced Specialty Gas Equipment Sensors - Specifications and Materials of Construction

MASS FLOW SYSTEMS
Sensors—Specifications and Materials of Construction

ASGE Mass Flow Sensor

Table VI, Specifcations—Mass Flow Sensors

	Fast Response Sensors 1FRM–17FRM	Fast Response Sensors 18FRM–19FRM	Fast Response Sensors 20FRM–24FRM
Operating Pressure Range	570 torr to 4500 psig	570 torr to 1500 psig	570 torr to 1500 psig
Operating Temperature Range	40°F to 150°F	40°F to 150°F	40°F to 150°F
Maximum Flow Capacity	See Table VIII	See Table VIII	See Table VIII
Minimum Flow Capacity	2% of max. flow capacity	2% of max. flow capacity	2% of max. flow capacity
Accuracy	± 1% of full scale at calibrated conditions	± 1% of full scale at calibrated conditions	± 1% of full scale at calibrated conditions
Repeatability	± 0.25% of full scale	± 0.25% of full scale	± 0.25% of full scale
Response Time	3 seconds max¹	3 seconds max¹	3 seconds max¹
Pressure Drop	10" water column at maximum flow	10" water column at maximum flow	10" water column at maximum flow
Mounting Attitude Sensitivity	±0.5% of Full Scale²	±0.5% of Full Scale²	±0.5% of Full Scale²
Inlet and Outlet Connections	1/4" compression³	3/8" compression³	1/2" NPT female⁵
Dimensions (inches)	5.50 x 1.48 x 4.32⁴	5.50 x 1.48 x 4.32⁴	7.00 x 3.30 x 6.10
Weight (approximate)	2 lbs.	2 lbs.	13 lbs.
Electrical Connection	15–pin Type D male connector	15–pin Type D male connector	15–pin Type D male connector
Power Requirements	+15 VDC at 35mA -15 VDC at 35mA	+15 VDC at 35mA -15 VDC at 35mA	+15 VDC at 35mA -15 VDC at 35mA
Flow Output Signal	0–5 VDC into 3000 ohm (or greater) load	0–5 VDC into 3000 ohm (or greater) load	0–5 VDC into 2000 ohm (or greater) load

1. To within 2% of set points.
2. Maximum deviation from stated accuracy specification.
3. VCR® connections are available on special order.
4. Dimensions include compression end connectors.
5. 1" or 1 1/2" NPT or 1/2", 3/4" or 1" compression connections available on special order.

Table VII, Materials of Construction—Mass Flow Sensors (All Models)

Metal Parts Exposed to Gas: Type 316 Stainless Steel
Seals: Viton® (Buna-N or Kalrez® Seals available on special order)