Advanced Specialty Gas Equipment

MASS FLOW SYSTEMS
Sensors—Specifications and Materials of Construction

ASGE Mass Flow Sensor

Table VI, Specifcations—Mass Flow Sensors

  Fast Response
Sensors
1FRM–17FRM
Fast Response
Sensors
18FRM–19FRM
Fast Response
Sensors
20FRM–24FRM
Operating Pressure Range 570 torr to 4500 psig 570 torr to 1500 psig 570 torr to 1500 psig
Operating Temperature Range 40°F to 150°F 40°F to 150°F 40°F to 150°F
Maximum Flow Capacity See Table VIII See Table VIII See Table VIII
Minimum Flow Capacity 2% of max.
flow capacity
2% of max.
flow capacity
2% of max.
flow capacity
Accuracy ± 1% of full scale
at calibrated conditions
± 1% of full scale
at calibrated conditions
± 1% of full scale
at calibrated conditions
Repeatability ± 0.25% of full scale ± 0.25% of full scale ± 0.25% of full scale
Response Time 3 seconds max¹ 3 seconds max¹ 3 seconds max¹
Pressure Drop 10" water column
at maximum flow
10" water column
at maximum flow
10" water column
at maximum flow
Mounting Attitude Sensitivity ±0.5% of Full Scale² ±0.5% of Full Scale² ±0.5% of Full Scale²
Inlet and Outlet Connections 1/4" compression³ 3/8" compression³ 1/2" NPT female5
Dimensions (inches) 5.50 x 1.48 x 4.324 5.50 x 1.48 x 4.324 7.00 x 3.30 x 6.10
Weight (approximate) 2 lbs. 2 lbs. 13 lbs.
Electrical Connection 15–pin Type D
male connector
15–pin Type D
male connector
15–pin Type D
male connector
Power Requirements +15 VDC at 35mA
-15 VDC at 35mA
+15 VDC at 35mA
-15 VDC at 35mA
+15 VDC at 35mA
-15 VDC at 35mA
Flow Output Signal 0–5 VDC into 3000 ohm
(or greater) load
0–5 VDC into 3000 ohm
(or greater) load
0–5 VDC into 2000 ohm
(or greater) load
1. To within 2% of set points.
2. Maximum deviation from stated accuracy specification.
3. VCR® connections are available on special order.
4. Dimensions include compression end connectors.
5. 1" or 1 1/2" NPT or 1/2", 3/4" or 1" compression connections available on special order.

Table VII, Materials of Construction—Mass Flow Sensors (All Models)

Metal Parts Exposed to Gas: Type 316 Stainless Steel
Seals: Viton® (Buna-N or Kalrez® Seals available on special order)