Advanced Specialty Gas Equipment Sensors

MASS FLOW SYSTEMS
Sensors —Selection Guide

Table VIII, Selection Guide—Mass Flow Sensors

Maximum Flow Capacity (Minimum Capacity = 2% of Maximum)
Model Numbers FastResponse Sensors	Air, Argon, Carbon Monoxide, Deuterium, Helium, Hydrogen, Krypton, Neon, Nitrogen, Oxygen, Xenon	Ammonia, Arsine, Carbon Dioxide, Chlorine, Hydrogen Chloride, Hydrogen Sulfide, Methane, Nitrous Oxide, Phosphine	Acetylene, Ethylene, Silane, Sulfur Dioxide	Dichlorosilane, Ethane, Halocarbon 13, Halocarbon 13B1, Halocarbon 14 , Propylene	Butane, Halocarbon12, Isobutane, Propane, Sulfur Hexafluoride
1FRM	5 sccm*	–	–	–	–
2FRM	10 sccm*	5 sccm	5 sccm	–	–
3FRM	20 sccm	10 sccm	10 sccm	5 sccm	–
4FRM	30 sccm	20 sccm	20 sccm	310 sccm	5 sccm
5FRM	50 sccm	30 sccm	30 sccm	20 sccm	10 sccm
6FRM	100 sccm	50 sccm	50 sccm	30 sccm	20 sccm
7FRM	200 sccm	100 sccm	100 sccm	50 sccm	30 sccm
8FRM	300 sccm	200 sccm	200 sccm	100 sccm	50 sccm
9FRM	500 sccm	300 sccm	300 sccm	200 sccm	100 sccm
10FRM	1000 sccm	500 sccm	500 sccm	300 sccm	200 sccm
11FRM	2000 sccm	1000 sccm	1000 sccm	500 sccm	300 sccm
12FRM	3000 sccm	2000 sccm	2000 sccm	1000 sccm	500 sccm
13FRM	5000 sccm	3000 sccm	3000 sccm	2000 sccm	1000 sccm
14FRM	10 slpm	5000 sccm	5000 sccm	3000 sccm	2000 sccm
15FRM	15 slpm	10 slpm	10 slpm	5000 sccm	3000 sccm
16FRM	20 slpm	15 slpm	15 slpm	10 slpm	5000 sccm
17FRM	30 slpm	20 slpm	20 slpm	15 slpm	10 slpm
18FRM	50 slpm	30 slpm	30 slpm	20 slpm	15 slpm
19FRM	100 slpm	50 slpm	50 slpm	30 slpm	20 slpm
20FRM	150 slpm	100 slpm	100 slpm	50 slpm	30 slpm
21FRM	200 slpm	150 slpm	150 slpm	100 slpm	50 slpm
22FRM	300 slpm	200 slpm	200 slpm	150 slpm	100 slpm
23FRM	500 slpm	300 slpm	300 slpm	200 slpm	150 slpm
24FRM	1000 slpm	500 slpm	500 slpm	300 slpm	200 slpm

* Minimum flow range available for hydrogen and helium service is 20 sccm.
When ordering Mass Flow Sensors, specify gas service, operating pressure, operating temperature and flow range for each sensor. Calibration for one service gas (or gas mixture) at pressures up to 200 psig on models 1FRM–17FRM and 90 psig on models 18FRM–24FRM is included. Calibrations on models 1FRM–17FRM for pressures above 200 psig and above 90 psig on models 18FRM–19FRM are available as an option. See Optional Equipment Table.
One 25 ft. interconnecting cable will be included with each Mass Flow Sensor ordered.

Optional Equipment

Equipment	Part No.
Inlet Filter, High Purity, Type 316 Stainless Steel (fits between Sensor and Inlet Fitting -(PDF))
0.5 micron Filter, Viton Seal**	FM4800
2 micron Filter, Viton Seal**	FM4802
5 micron Filter, Viton Seal**	FM4805
10 micron Filter, Viton Seal**	FM4810
40 micron Filter, Viton Seal**	FM4840
Low Flow (10 sccm or less, 20 sccm for helium and hydrogen)
Calibration--Control Modules only	CCO-50
High Pressure Calibration	CCO-150

** Buna-N or Kalrez® Seals available on special order.