Advanced Specialty Gas Equipment

MASS FLOW SYSTEMS
Sensors —Selection Guide

Table VIII, Selection Guide—Mass Flow Sensors

Maximum Flow Capacity (Minimum Capacity = 2% of Maximum)
Model
Numbers
FastResponse
Sensors
Air, Argon,
Carbon Monoxide,
Deuterium,
Helium, Hydrogen,
Krypton, Neon,
Nitrogen,
Oxygen, Xenon
Ammonia, Arsine,
Carbon Dioxide,
Chlorine,
Hydrogen Chloride,
Hydrogen Sulfide,
Methane,
Nitrous Oxide,
Phosphine
Acetylene,
Ethylene, Silane,
Sulfur Dioxide
Dichlorosilane,
Ethane,
Halocarbon 13,
Halocarbon 13B1,
Halocarbon 14 ,
Propylene
Butane,
Halocarbon12,
Isobutane,
Propane, Sulfur
Hexafluoride
1FRM 5 sccm*
2FRM 10 sccm* 5 sccm 5 sccm
3FRM 20 sccm 10 sccm 10 sccm 5 sccm
4FRM 30 sccm 20 sccm 20 sccm 310 sccm 5 sccm
5FRM 50 sccm 30 sccm 30 sccm 20 sccm 10 sccm
6FRM 100 sccm 50 sccm 50 sccm 30 sccm 20 sccm
7FRM 200 sccm 100 sccm 100 sccm 50 sccm 30 sccm
8FRM 300 sccm 200 sccm 200 sccm 100 sccm 50 sccm
9FRM 500 sccm 300 sccm 300 sccm 200 sccm 100 sccm
10FRM 1000 sccm 500 sccm 500 sccm 300 sccm 200 sccm
11FRM 2000 sccm 1000 sccm 1000 sccm 500 sccm 300 sccm
12FRM 3000 sccm 2000 sccm 2000 sccm 1000 sccm 500 sccm
13FRM 5000 sccm 3000 sccm 3000 sccm 2000 sccm 1000 sccm
14FRM 10 slpm 5000 sccm 5000 sccm 3000 sccm 2000 sccm
15FRM 15 slpm 10 slpm 10 slpm 5000 sccm 3000 sccm
16FRM 20 slpm 15 slpm 15 slpm 10 slpm 5000 sccm
17FRM 30 slpm 20 slpm 20 slpm 15 slpm 10 slpm
18FRM 50 slpm 30 slpm 30 slpm 20 slpm 15 slpm
19FRM 100 slpm 50 slpm 50 slpm 30 slpm 20 slpm
20FRM 150 slpm 100 slpm 100 slpm 50 slpm 30 slpm
21FRM 200 slpm 150 slpm 150 slpm 100 slpm 50 slpm
22FRM 300 slpm 200 slpm 200 slpm 150 slpm 100 slpm
23FRM 500 slpm 300 slpm 300 slpm 200 slpm 150 slpm
24FRM 1000 slpm 500 slpm 500 slpm 300 slpm 200 slpm
* Minimum flow range available for hydrogen and helium service is 20 sccm.
When ordering Mass Flow Sensors, specify gas service, operating pressure, operating temperature and flow range for each sensor. Calibration for one service gas (or gas mixture) at pressures up to 200 psig on models 1FRM–17FRM and 90 psig on models 18FRM–24FRM is included. Calibrations on models 1FRM–17FRM for pressures above 200 psig and above 90 psig on models 18FRM–19FRM are available as an option. See Optional Equipment Table.
One 25 ft. interconnecting cable will be included with each Mass Flow Sensor ordered.

Optional Equipment

Equipment Part No.
Inlet Filter, High Purity, Type 316 Stainless Steel
(fits between Sensor and Inlet Fitting -(PDF))
   0.5 micron Filter, Viton Seal** FM4800
   2 micron Filter, Viton Seal** FM4802
   5 micron Filter, Viton Seal** FM4805
   10 micron Filter, Viton Seal** FM4810
   40 micron Filter, Viton Seal** FM4840
Low Flow (10 sccm or less, 20 sccm for helium and hydrogen)
   Calibration--Control Modules only CCO-50
High Pressure Calibration CCO-150
** Buna-N or Kalrez® Seals available on special order.