Advanced Specialty Gas Equipment


GAS DATA & EQUIPMENT RECOMMENDATIONS
Pure Gases

The following information is provided as a guide to assist you in your choice of a pressure regulator for specific cylinder gases. It is divided into three distinct groupings--Pure Gases; Pure Gases in Lecture Bottles; and Two-Component Gas Mixtures.

To use this guide, simply locate the gas or gas mixture you are using within the appropriate grouping. The tables for Pure Gases, and Pure Gases in Lecture Bottles have their information initially arranged alphabetically by the gas of interest, and then secondarily alphabetized by the specific grade of that gas. The information in the Two-Component Gas Mixtures table is listed first alphabetically by minor component, and then alphabetically by the balance gas, or major component. For example, 2% Ammonia, 98% Helium would be listed first under Ammonia (the minor component), and then under "In Helium" (the balance gas) within the Ammonia grouping.

Across from each individual listing you will find that product's corresponding valve outlet connection number (CGA Connection); the recommended regulator model; and a reference page number directing you to where additional information and complete specifications on that regulator can be found. In the Pure Gas Table you will also find certain physical properties of the gas, such as chemical formula, molecular weight, vapor pressure (for liquefied gases), specific gravity and specific volume. In certain cases, where pressure reduction is not desired or required--as with very low pressure products such as Boron Trichloride--a manual control valve has been recommended instead of a pressure regulator. Please remember that Manual Control Valves control flow, not pressure.

You should note that the recommendations contained herein are valid, and generally preferred for the more common applications of the products indicated; and consideration has been given to safety, materials compatibility, as well as to convenience and suitability for these common applications. However, the recommendations shown may not be the only models that are suitable, and your specific application may have subtleties that would indicate another selection is a more preferable choice. If you feel this is the case, or if you are using a product that is not listed within these tables, please do not hesitate to contact one of our Technical Representatives, or your Advanced Specialty Gas Equipment Distributor to discuss your requirements.

Pure Gases

Gas
Grade

Mol.
Weight
Vapor
Pressure
(psig
at 70°F)

Specific
Gravity
(Air = 1)
Specific
Volume
(ft3/lb.
at 70°F)
CGA
Connection
Number
Equipment
Recommendations
Acetylene (C2H2) 26.038 -- 0.91 at 32°F 14.5    
  Atomic Absorption         510 SSG9048
  Commercial Grade, 98.0%         510 SSG9048
  Purified         510 SSG9048
  Technical         510 SSG9048
Air 28.975 -- 1.00 13.3    
  Blended Air         590 TSD
  CO2Free         590 LABE/HPE
  Compressed Air         346 TSD
   Dry         346/590* TSD
  High Pressure (3500 psig)         347 AG3850 Series
  High Pressure (6000 psig)         702 SG3600 or SG3610
  Hydrocarbon Free         346/590* LABE/HPE
  USP         346/950* AG3660 Series
  Ultra Pure Carrier         590 HPE
  Ultra Zero         590 HPE
  Vehicle Emission Zero         590 LABE/HPE
  V.O.C. Free Air         590 LABE/HPE
  Zero         346/590* LABE/HPE
Allene (C3H4) 40.065 116.7 1.415 at 68°F 9.6    
          510 SSE
Ammonia (NH3) 17.031 114.1 0.597 22.7    
  Anhydrous         705 ARG
  Electronic         660 AG3870 Series
  Nitride         660 AG3870 Series
  Research         660 AG3870 Series
  Semiconductor Purity         660 AG3870 Series
  SFC Grade         660 MV5800 Series
  ULSI Purity         660 AG3870 Series
  Ultra High Purity         660 AG3870 Series
Argon (Ar) 39.948 -- 1.378 9.68    
  Grade 6™         580 HPE
  High Pressure (3500 psig)         680 AG3850 Series
  High Pressure (6000 psig)         677 SG3600 or SG3610
  High Purity         580 LABE
  Oxygen Free         580 LABE/HPE
  Prepurified         580 LABE
  Research         580 HPD
  Semiconductor Purity         580 HPE
  Sputtering         580 HPE
  ULSI Purity         580 HPE
  Ultra High Purity         580 HPE
  Ultraplus™         580 HPE
  Ultra Pure Carrier         580 LABE/HPE
  Zero         580 LABE/HPE
Arsine (AsH3) 77.946 205 2.69 5.0    
  Electronic         350/632* AG3870 Series
  ULSI Purity         350/632* AG3870 Series
Boron Trichloride (BCl3) 117.169 4.4 4.03 3.3    
  CP         660 MV5800 Series
  Electronic         660 MV5800 Series
  Semiconductor Purity         660 MV5800 Series
  VLSI Etchant         660 MV5800 Series
Boron Trifluoride (BF3) 67.805 -- 2.387 5.7    
  CP         330 ASB
1,3 Butadiene (C4H6) 54.0929 21.4 1.915 at 60°F 6.9    
  CP         510 SSE
  High Purity (Inhibited)         510 LABD
  Instrument         510 LABD
  Research         510 HPD
Butane (C4H10) 58.123 16.3 2.110 at 68°F 6.4    
  CP         510 SSE
  Instrument         510 LABD
  Technical         510 SSE
n-Butane See Butane            
iso-Butane See Isobutane            
1-Butene (C4H8) 56.108 23.5 1.937 6.7    
  CP         510 SSE
  High Purity         510 LABD
  Research         510 HPD
cis-2-Butene (C4H8) 56.108 13 1.997 at 68°F 6.7    
  High Purity         510 LABD
  Technical         510 SSE
trans-2-Butene (C4H8) 56.108 15 1.997 at 68°F 6.7    
  High Purity         510 LABD
  Technical         510 SSE
(cis & trans) 2-Butene (C4H8) 56.108 14 1.997 at 68°F 6.7    
  Technical         510 SSE
iso-Butylene See Isobutylene            
Carbon Dioxide (CO2) 44.011 830 1.522 8.76    
  Anaerobic         320 LABE
  Bone Dry         320 SG9011 or SG9014
  CP         320 SG9011 or SG9014
  Commercial         320 SG9011 or SG9014
  Electronic         320 HPE
  Instrument (Coleman)         320 LABE
  Precision Aquarator®         320 HPE
  Research         320 HPE
  SFC Grade         320 MV5700 Series
  SFE         320 MV5700 Series
  Spectra-Clean®, Grade 5™         320 HPE
  USP         320/940* AG3660 Series
Carbon Monoxide (CO) 28.010 -- 0.968 13.8    
  CP         350 LABE
  Commercial         350 TSD
  Research         350 HPD
  Technical         350 LABE
  Ultra High Purity         350 HPE
Carbon Tetrafluoride
See Halocarbon 14
           
Carbonyl Sulfide (COS) 60.070 160 2.10 at 68°F 6.4    
          330 ARG
Chlorine (Cl2) 70.906 85.3 2.473 at 68°F 5.4    
  High Purity         660 CRH/ASB
  Research         660 AG3870 Series
  Semiconductor Purity         660 AG3870 Series
  ULSI Purity         660 AG3870 Series
  Ultra High Purity         660 CRH/ASB
Cyclopropane (C3H6) 42.081 75.0 1.453 at 68°F 9.2    
          510 SSE
Deuterium (D2) 4.032 -- 0.139 at 32°F 95.9    
  CP         350 HPE
  Research         350 HPD
Dichlorosilane (H2SiCl2) 101.010 9.1 3.52 at 77°F 3.83    
  Electronic         678 SG3860
  Semiconductor Purity         678 SG3860
  ULSI Purity         678 SG3860
  Ultraplus™         678 SG3860
Dimethylamine (C2H7N) 45.085 11.3 1.557 at 77°F 8.6    
          705 CRH
Dimethyl Ether (C2H6O) 46.069 62.3 1.59 8.4    
          510 SSE
2,2-Dimethylpropane (C5H12) 72.151 7.0 2.49 at 77°F 5.3    
  Research         510 MV5700 Series
Ethane (C2H6) 30.07 544 1.047 at 60°F 12.8    
  CP         350 LABD
  Research         350 HPD
  Technical         350 SSD
  Ultra High Purity         350 HPD
Ethyl Acetylene (C4H6) 54.092 8.5 1.93 at 77°F 7.2    
          510 MV5800 Series
Ethyl Chloride (C2H5) 64.515 5.3 2.22 at 68°F 6.0    
  High Purity         300 MV5700 Series
Ethylene (C2H4) 28.054 -- 0.978 at 32°F 13.8    
  CP         350 LABE
  Polymer Grade         350 LABE
  Research         350 HPD
  Technical         350 TSD
Ethylene Oxide (C2H4)
99.90%
44.054 6.5 1.52 8.78    
          510 MV5800 Series
Halocarbon 12 (CCl2F2)
(Dichlorodifluoromethane)
120.914 70.2 4.26 3.14    
          660 SSE
Halocarbon 13 (CClF3)
(Chlorotrifluoromethane)
104.459 458.7 3.70 3.61    
          320/660* LABD
Halocarbon 13B1 (CBrF3)
(Bromotrifluoromethane)
148.910 189 5.30 2.6    
          320/660* SSE
Halocarbon 14 (CF4)
(Tetrafluoromethane)
88.005 -- 3.038 4.39    
  Electronic         320/660* HPE
  Semiconductor Purity         320/580* HPE
  Ultraplus™         320/660* HPE
  VLSI         580 HPE
Halocarbon 21 (CHCl2F)
(Dichlorofluoromethane)
102.923 8.4 3.82 at 68°F 3.5    
          660 MV5700 Series
Halocarbon 22 (CHClF2)
(Chlorodifluoromethane)
86.469 123 3.08 4.4    
          660 SSE
Halocarbon 23 (CHF3)
(Trifluoromethane)
70.014 635 2.43 5.5    
  Technical         660 SSD
  Ultraplus™         320/660* HPD
  99.90%         320/660* LABD
Halocarbon 114 (C2Cl2F4)
(1,2-Dichlorotetrafluoroethane)
170.922 12.9 5.93 at 77°F 2.3    
          660 SSE
Halocarbon 115 (C2ClF5)
(Chloropentafluoroethane)
154.467 102 5.569 2.4    
          660 SSE
Halocarbon 116 (C2F6)
(Hexafluoroethane)
138.012 430.3 4.773 2.8    
  99.90%         320/660* LABD
  Semiconductor Purity         660 HPD
Halocarbon 142B (C2H3ClF2)
(1-Chloro-1,1-Difluoroethane)
100.496 27.8 3.63 3.68    
          510 SSE
Halocarbon 152A (C2H4F2)
(1,1-Difluoroethane)
66.051 63 2.36 5.85    
          510 SSE
Halocarbon C-318 (C4F8)
(Octafluorocyclobutane)
200.031 25 7.33 1.85    
          660 SSE
Halocarbon 500
(73.8 wt.% Halocarbon 12
26.2 wt.% Halocarbon 152A)
100.1 82.3 3.5 3.82    
          660/510* SSE
Halocarbon 502
(48.8 wt.% Halocarbon 22
51.2 wt.% Halocarbon 115)
111.63 132.2 3.87 3.45    
          320/660* SSE
Halocarbon 503
(60 wt.% Halocarbon 23
40 wt.% Halocarbon 13)
87.247 613 3.07 4.3    
          320 SSD
Halocarbon 1113 (C2ClF3)
(Chlorotrifluoroethylene)
116.47 62 4.13 3.30    
          510 SSE
Halocarbon 1132A (C2H2F2)
(1,1-Difluoroethylene)
64.035 518 2.21 at 77°F 6.0    
          350 SSD
Helium (He) 4.003 -- 0.138 96.7    
  Carrier Grade         580 LABE/HPE
  Chromatographic         580 HPE
  ECD Grade         580 HPE
  Grade 6™         580 HPE
  High Pressure (3500 psig)         680 AG3850 Series
  High Pressure (6000 psig)         677 SG3600 or SG3610
  High Purity         580 LABE
  Oxygen Free         580 LABE/HPE
  Research         580 HPD
  Semiconductor Purity         580 HPE
  Ultra High Purity         580 HPE
  Ultraplus™         580 HPE
  Ultra Pure Carrier         580 HPE
  ULSI         580 HPE
  USP         580/930* AG3660 Series
  Zero         580 LABE/HPE
Hexafluoropropylene (C3F6) 150.023 85 5.18 at 68°F 2.58    
          660 LABD
Hydrogen (H2) 2.016 -- 0.0696 191.7    
  Carrier Grade         350 LABE/HPE
  Extra Dry         350 LABE
  High Pressure (3500 psig)         695 AG3850 Series
  High Pressure (6000 psig)         703 SG3610
  High Purity         350 LABE
  Prepurified         350 LABE
  Purified         350 LABE
  Research         350 HPD
  Semiconductor Purity         350 HPE
  ULSI Purity         350 HPE
  Ultra High Purity         350 HPE
  Ultraplus™         350 HPE
  Ultra Pure Carrier         350 HPE
  Zero         350 LABE/HPE
Hydrogen Bromide (HBr) 80.912 320 2.812 at 77°F 4.8    
  Grade 2.8™         330 APC
  ULSI Purity         330 APC
Hydrogen Chloride (HCl) 36.461 613 1.268 at 68°F 10.6    
  Electronic         330 AG3870 Series
  Research         330 AG3870 Series
  Technical         330 CRH/ASB
  ULSI Purity         330 AG3870 Series
  Ultra High Purity         330 CRH/ASB
Hydrogen Selenide (H2Se) 80.976 124.9 2.80 at 77°F 4.8    
  Research         660 AG3870 Series
  Semiconductor Purity         350 AG3870 Series
  ULSI Purity         350 AG3870 Series
Hydrogen Sulfide (H2S) 34.076 252 1.189 at 59°F 11.23    
  CP         330 APC
  Research         330 APC
  Technical         330 ARG
Isobutane (C4H10) 58.124 30.7 2.01 6.5    
  CP         510 SSE
  Instrument         510 LABD
  Research         510 HPD
  Technical         510 SSE
Isobutylene (C4H8) 56.108 24.3 1.997 6.7    
  CP         510 SSE
  High Purity         510 SSE
  Research         510 HPD
Isopentane (C5H12) 72.151 -3.2 2.48 --    
  CP         510 MV5700 Series
Krypton (Kr) 83.800 -- 2.899 4.6    
  Purified         580 HPE
  Research         580 HPD
Methane (CH4) 16.043 -- 0.554 at 32°F 23.7    
  Commercial         350 TSD
  CP         350 LABE
  High Pressure (3500 psig)         695 AG3850 Series
  High Pressure (6000 psig)         703 SG3610
  Instrument         350 LABE
  Purified         350 LABE
  Research         350 HPD
  Technical         350 TSD
  Ultra High Purity         350 HPE
  Ultra Pure         350 HPE
Methyl Bromide (CH3Br) 94.939 13 3.355 at 77°F 4.1    
          330/320* LABD
Methyl Chloride (CH3Cl) 50.488 58.7 1.74 at 32°F 7.6    
          510/660* LABD
Methyl Mercaptan (CH3SH) 48.107 15 1.66 at 68°F 8.0    
          330 APC
Monomethylamine (CH3NH2) 31.058 28.8 1.08 at 68°F 12.1    
          705 CRH
Natural Gas 17.656 -- 0.55 24    
          350 TSD
Neon (Ne) 20.183 -- 0.696 19.2    
  CP         580 LABE
  First Run         580 TSD
  High Purity         580 HPE
  Research         580 HPD
  Ultra High Purity         580 HPE
  Ultra Pure         580 HPE
Nitric Oxide (NO) 30.006 -- 1.04 1.04    
  CP         660 CRH
Nitrogen (N2) 28.013 -- 0.967 13.8    
  ECD Grade         580 HPE
  Extra Dry         580 LABE
  Grade 6™         580 HPE
  High Pressure (3500 psig)         680 AG3850 Series
  High Pressure (6000 psig)         677 SG3600 or SG3610
  High Purity         580 LABE
  Low Oxygen         580 LABE
  NF--High Purity         580/960* AG3660 Series
  Oxygen Free         580 LABE/HPE
  Prepurified         580 LABE
  Research         580 HPD
  Semiconductor Purity         580 HPE
  Ultra High Purity         580 HPE
  Ultraplus™         580 HPE
  Ultra Pure Carrier         580 HPE
  Ultra Zero Ambient Monitoring Zero         580 HPE
  Vehicle Emission Zero         580 HPE
  VOC Free Nitrogen         580 HPE
  Zero         580 LABE/HPE
Nitrogen Dioxide (NO2) 46.005 0.0 psig 1.58 4.7    
  CP         660 MV5800 Series
Nitrous Oxide (N2O) 44.013 745 1.53 at 68°F 8.7    
  Atomic Absorption         326 SG9011
  CP         326 SG9011
  Electronic Grade         326 HPD
  High Purity         326 LABD
  Industrial         326 SG9011
  Research         326 HPD
  Semiconductor Purity         326 HPD
  SFC Purity         326 MV5700 Series
  Technical         326 SG9011
  Ultra High Purity         326 HPD
  Ultraplus™         326 HPD
  USP         326/910* AG3660 Series
Oxygen (O2) 32.00 -- 1.105 at 77°F 12.1    
  Extra Dry         540 LABE
  Grade 5™         540 LABE
  Hydrocarbon Free UHP         540 HPE
  MOS         540 HPE
  Research         540 HPD
  Ultra High Purity         540 HPE
  Ultra Pure Carrier         540 HPE
  Ultra Zero         540 HPE
  USP         540/870* AG3660 Series
  Zero         540 LABE/HPE
Perfluoropropane (C3F8) 188.020 100.1 6.69 at 68°F 2.02    
Semiconductor Purity         660 HPD
Phosgene (COCl2) 98.916 10.7 3.48 at 77°F 3.9    
          660 MV5800 Series
Phosphine (PH3) 33.998 593 1.184 11.4    
  Electronic         350/632* AG3870 Series
  ULSI Purity         350/632* AG3870 Series
Phosphorous (PF5) 125.966 400 4.46 3.1    
  Pentafluoride         330/660* AG3870 Series
Propane (C3H8) 44.097 109 1.55 at 68°F 8.5    
  CP         510 LABD
  Instrument         510 LABD
  Natural         510 SSE
  Research         510 HPD
Propylene (C3H6) 42.081 136.6 1.48 at 68°F 9.06    
  CP         510 LABD
  Polymer Purity         510 LABD
  Research         510 HPD
Silane (SiH4) 32.118 -- 1.114 12.0    
  Electronic         350/632* SG3862 or SG3865
  Nitride         350 SG3862 or SG3865
  Semiconductor Purity         350/632* SG3862 or SG3865
  Solar/VLSI         350 SG3862 or SG3865
  ULSI Purity         7350/632* SG3862 or SG3865
  Ultraplus™         350/632* SG3862 or SG3865
Silicon Tetrafluoride (SiF4) 104.080 -- 3.63 at 68°F 3.7    
  Semiconductor Purity         330 APC
Sulfur Dioxide (SO2) 64.063 34.4 2.262 5.9    
  Anhydrous         660 APC
  Commercial         660 ARG
Sulfur Hexafluoride (SF6) 146.051 320 5.11 at 68°F 2.5    
  Commercial         590 LABD
  CP         590 LABD
  Electronic         590 HPD
  Etchant         590 HPD
  Grade 3™         590 LABD
  Grade 4™         590 LABD
  Instrument Purity         590 LABD
  SFC         590 MV5700 Series
  ULSI Purity         590 HPD
  Ultraplus™         590 HPD
Sulfur Tetrafluoride (SF4) 108.058 140 3.783 at 68°F 3.6    
  Technical         330 CRH
Trimethylamine (C3H9N) 59.112 13.3 2.087 at 68°F 6.4    
          705 CRH
Vinyl Methyl Ether (C3H6O) 58.080 10.6 1.99 at 68°F 6.7    
          290 MV5800 Series
Xenon (Xe) 131.300 -- 4.560 2.9    
  Purified         580 HPE
  Research         580 HPD
 * CGA Connection may vary depending upon cylinder size or gas manufacturer. Check with your gas supplier to determine actual CGA connection.