GAS DATA & EQUIPMENT RECOMMENDATIONS
Pure Gases
The following information is provided as a guide to assist you in your choice of a pressure regulator for specific cylinder gases. It is divided into
three distinct groupings--Pure Gases; Pure Gases in Lecture Bottles; and Two-Component Gas Mixtures.
To use this guide, simply locate the gas or gas mixture you are using within the appropriate grouping. The tables for Pure Gases, and Pure Gases in
Lecture Bottles have their information initially arranged alphabetically by the gas of interest, and then secondarily alphabetized by the specific grade
of that gas. The information in the Two-Component Gas Mixtures table is listed first alphabetically by minor component, and then alphabetically by the
balance gas, or major component. For example, 2% Ammonia, 98% Helium would be listed first under Ammonia (the minor component), and then under "In Helium" (the
balance gas) within the Ammonia grouping.
Across from each individual listing you will find that product's corresponding valve outlet connection number (CGA Connection); the recommended regulator
model; and a reference page number directing you to where additional information and complete specifications on that regulator can be found. In the Pure
Gas Table you will also find certain physical properties of the gas, such as chemical formula, molecular weight, vapor pressure (for liquefied gases),
specific gravity and specific volume. In certain cases, where pressure reduction is not desired or required--as with very low pressure products such as
Boron Trichloride--a manual control valve has been recommended instead of a pressure regulator. Please remember that Manual Control Valves control flow,
not pressure.
You should note that the recommendations contained herein are valid, and generally preferred for the more common applications of the products indicated;
and consideration has been given to safety, materials compatibility, as well as to convenience and suitability for these common applications. However,
the recommendations shown may not be the only models that are suitable, and your specific application may have subtleties that would indicate another selection
is a more preferable choice. If you feel this is the case, or if you are using a product that is not listed within these tables, please do not hesitate
to contact one of our Technical Representatives, or your Advanced Specialty Gas Equipment Distributor to discuss your requirements.
Pure Gases
Gas
Grade |
Mol.
Weight |
Vapor
Pressure
(psig
at 70°F) |
Specific
Gravity
(Air = 1) |
Specific
Volume
(ft3/lb.
at 70°F) |
CGA
Connection
Number |
Equipment
Recommendations |
| Acetylene (C2H2) |
26.038 |
-- |
0.91 at 32°F |
14.5 |
|
|
| Atomic Absorption |
|
|
|
|
510 |
SSG9048 |
| Commercial Grade, 98.0% |
|
|
|
|
510 |
SSG9048 |
| Purified |
|
|
|
|
510 |
SSG9048 |
| Technical |
|
|
|
|
510 |
SSG9048 |
| Air |
28.975 |
-- |
1.00 |
13.3 |
|
|
| Blended Air |
|
|
|
|
590 |
TSD |
| CO2Free |
|
|
|
|
590 |
LABE/HPE |
| Compressed Air |
|
|
|
|
346 |
TSD |
| Dry |
|
|
|
|
346/590* |
TSD |
| High Pressure (3500 psig) |
|
|
|
|
347 |
AG3850 Series |
| High Pressure (6000 psig) |
|
|
|
|
702 |
SG3600 or SG3610 |
| Hydrocarbon Free |
|
|
|
|
346/590* |
LABE/HPE |
| USP |
|
|
|
|
346/950* |
AG3660 Series |
| Ultra Pure Carrier |
|
|
|
|
590 |
HPE |
| Ultra Zero |
|
|
|
|
590 |
HPE |
| Vehicle Emission Zero |
|
|
|
|
590 |
LABE/HPE |
| V.O.C. Free Air |
|
|
|
|
590 |
LABE/HPE |
| Zero |
|
|
|
|
346/590* |
LABE/HPE |
| Allene (C3H4) |
40.065 |
116.7 |
1.415 at 68°F |
9.6 |
|
|
| |
|
|
|
|
510 |
SSE |
| Ammonia (NH3) |
17.031 |
114.1 |
0.597 |
22.7 |
|
|
| Anhydrous |
|
|
|
|
705 |
ARG |
| Electronic |
|
|
|
|
660 |
AG3870 Series |
| Nitride |
|
|
|
|
660 |
AG3870 Series |
| Research |
|
|
|
|
660 |
AG3870 Series |
| Semiconductor Purity |
|
|
|
|
660 |
AG3870 Series |
| SFC Grade |
|
|
|
|
660 |
MV5800 Series |
| ULSI Purity |
|
|
|
|
660 |
AG3870 Series |
| Ultra High Purity |
|
|
|
|
660 |
AG3870 Series |
| Argon (Ar) |
39.948 |
-- |
1.378 |
9.68 |
|
|
| Grade 6™ |
|
|
|
|
580 |
HPE |
| High Pressure (3500 psig) |
|
|
|
|
680 |
AG3850 Series |
| High Pressure (6000 psig) |
|
|
|
|
677 |
SG3600 or SG3610 |
| High Purity |
|
|
|
|
580 |
LABE |
| Oxygen Free |
|
|
|
|
580 |
LABE/HPE |
| Prepurified |
|
|
|
|
580 |
LABE |
| Research |
|
|
|
|
580 |
HPD |
| Semiconductor Purity |
|
|
|
|
580 |
HPE |
| Sputtering |
|
|
|
|
580 |
HPE |
| ULSI Purity |
|
|
|
|
580 |
HPE |
| Ultra High Purity |
|
|
|
|
580 |
HPE |
| Ultraplus™ |
|
|
|
|
580 |
HPE |
| Ultra Pure Carrier |
|
|
|
|
580 |
LABE/HPE |
| Zero |
|
|
|
|
580 |
LABE/HPE |
| Arsine (AsH3) |
77.946 |
205 |
2.69 |
5.0 |
|
|
| Electronic |
|
|
|
|
350/632* |
AG3870 Series |
| ULSI Purity |
|
|
|
|
350/632* |
AG3870 Series |
| Boron Trichloride (BCl3) |
117.169 |
4.4 |
4.03 |
3.3 |
|
|
| CP |
|
|
|
|
660 |
MV5800 Series |
| Electronic |
|
|
|
|
660 |
MV5800 Series |
| Semiconductor Purity |
|
|
|
|
660 |
MV5800 Series |
| VLSI Etchant |
|
|
|
|
660 |
MV5800 Series |
| Boron Trifluoride (BF3) |
67.805 |
-- |
2.387 |
5.7 |
|
|
| CP |
|
|
|
|
330 |
ASB |
| 1,3 Butadiene (C4H6) |
54.0929 |
21.4 |
1.915 at 60°F |
6.9 |
|
|
| CP |
|
|
|
|
510 |
SSE |
| High Purity (Inhibited) |
|
|
|
|
510 |
LABD |
| Instrument |
|
|
|
|
510 |
LABD |
| Research |
|
|
|
|
510 |
HPD |
| Butane (C4H10) |
58.123 |
16.3 |
2.110 at 68°F |
6.4 |
|
|
| CP |
|
|
|
|
510 |
SSE |
| Instrument |
|
|
|
|
510 |
LABD |
| Technical |
|
|
|
|
510 |
SSE |
| n-Butane See Butane |
|
|
|
|
|
|
| iso-Butane See Isobutane |
|
|
|
|
|
|
| 1-Butene (C4H8) |
56.108 |
23.5 |
1.937 |
6.7 |
|
|
| CP |
|
|
|
|
510 |
SSE |
| High Purity |
|
|
|
|
510 |
LABD |
| Research |
|
|
|
|
510 |
HPD |
| cis-2-Butene (C4H8) |
56.108 |
13 |
1.997 at 68°F |
6.7 |
|
|
| High Purity |
|
|
|
|
510 |
LABD |
| Technical |
|
|
|
|
510 |
SSE |
| trans-2-Butene (C4H8) |
56.108 |
15 |
1.997 at 68°F |
6.7 |
|
|
| High Purity |
|
|
|
|
510 |
LABD |
| Technical |
|
|
|
|
510 |
SSE |
| (cis & trans) 2-Butene (C4H8) |
56.108 |
14 |
1.997 at 68°F |
6.7 |
|
|
| Technical |
|
|
|
|
510 |
SSE |
| iso-Butylene See Isobutylene |
|
|
|
|
|
|
| Carbon Dioxide (CO2) |
44.011 |
830 |
1.522 |
8.76 |
|
|
| Anaerobic |
|
|
|
|
320 |
LABE |
| Bone Dry |
|
|
|
|
320 |
SG9011 or SG9014 |
| CP |
|
|
|
|
320 |
SG9011 or SG9014 |
| Commercial |
|
|
|
|
320 |
SG9011 or SG9014 |
| Electronic |
|
|
|
|
320 |
HPE |
| Instrument (Coleman) |
|
|
|
|
320 |
LABE |
| Precision Aquarator® |
|
|
|
|
320 |
HPE |
| Research |
|
|
|
|
320 |
HPE |
| SFC Grade |
|
|
|
|
320 |
MV5700 Series |
| SFE |
|
|
|
|
320 |
MV5700 Series |
| Spectra-Clean®, Grade 5™ |
|
|
|
|
320 |
HPE |
| USP |
|
|
|
|
320/940* |
AG3660 Series |
| Carbon Monoxide (CO) |
28.010 |
-- |
0.968 |
13.8 |
|
|
| CP |
|
|
|
|
350 |
LABE |
| Commercial |
|
|
|
|
350 |
TSD |
| Research |
|
|
|
|
350 |
HPD |
| Technical |
|
|
|
|
350 |
LABE |
| Ultra High Purity |
|
|
|
|
350 |
HPE |
Carbon Tetrafluoride
See Halocarbon 14 |
|
|
|
|
|
|
| Carbonyl Sulfide (COS) |
60.070 |
160 |
2.10 at 68°F |
6.4 |
|
|
| |
|
|
|
|
330 |
ARG |
| Chlorine (Cl2) |
70.906 |
85.3 |
2.473 at 68°F |
5.4 |
|
|
| High Purity |
|
|
|
|
660 |
CRH/ASB |
| Research |
|
|
|
|
660 |
AG3870 Series |
| Semiconductor Purity |
|
|
|
|
660 |
AG3870 Series |
| ULSI Purity |
|
|
|
|
660 |
AG3870 Series |
| Ultra High Purity |
|
|
|
|
660 |
CRH/ASB |
| Cyclopropane (C3H6) |
42.081 |
75.0 |
1.453 at 68°F |
9.2 |
|
|
| |
|
|
|
|
510 |
SSE |
| Deuterium (D2) |
4.032 |
-- |
0.139 at 32°F |
95.9 |
|
|
| CP |
|
|
|
|
350 |
HPE |
| Research |
|
|
|
|
350 |
HPD |
| Dichlorosilane (H2SiCl2) |
101.010 |
9.1 |
3.52 at 77°F |
3.83 |
|
|
| Electronic |
|
|
|
|
678 |
SG3860 |
| Semiconductor Purity |
|
|
|
|
678 |
SG3860 |
| ULSI Purity |
|
|
|
|
678 |
SG3860 |
| Ultraplus™ |
|
|
|
|
678 |
SG3860 |
| Dimethylamine (C2H7N) |
45.085 |
11.3 |
1.557 at 77°F |
8.6 |
|
|
| |
|
|
|
|
705 |
CRH |
| Dimethyl Ether (C2H6O) |
46.069 |
62.3 |
1.59 |
8.4 |
|
|
| |
|
|
|
|
510 |
SSE |
| 2,2-Dimethylpropane (C5H12) |
72.151 |
7.0 |
2.49 at 77°F |
5.3 |
|
|
| Research |
|
|
|
|
510 |
MV5700 Series |
| Ethane (C2H6) |
30.07 |
544 |
1.047 at 60°F |
12.8 |
|
|
| CP |
|
|
|
|
350 |
LABD |
| Research |
|
|
|
|
350 |
HPD |
| Technical |
|
|
|
|
350 |
SSD |
| Ultra High Purity |
|
|
|
|
350 |
HPD |
| Ethyl Acetylene (C4H6) |
54.092 |
8.5 |
1.93 at 77°F |
7.2 |
|
|
| |
|
|
|
|
510 |
MV5800 Series |
| Ethyl Chloride (C2H5) |
64.515 |
5.3 |
2.22 at 68°F |
6.0 |
|
|
| High Purity |
|
|
|
|
300 |
MV5700 Series |
| Ethylene (C2H4) |
28.054 |
-- |
0.978 at 32°F |
13.8 |
|
|
| CP |
|
|
|
|
350 |
LABE |
| Polymer Grade |
|
|
|
|
350 |
LABE |
| Research |
|
|
|
|
350 |
HPD |
| Technical |
|
|
|
|
350 |
TSD |
Ethylene Oxide (C2H4)
99.90% |
44.054 |
6.5 |
1.52 |
8.78 |
|
|
| |
|
|
|
|
510 |
MV5800 Series |
Halocarbon 12 (CCl2F2)
(Dichlorodifluoromethane)
|
120.914 |
70.2 |
4.26 |
3.14 |
|
|
| |
|
|
|
|
660 |
SSE |
Halocarbon 13 (CClF3)
(Chlorotrifluoromethane) |
104.459 |
458.7 |
3.70 |
3.61 |
|
|
| |
|
|
|
|
320/660* |
LABD |
Halocarbon 13B1 (CBrF3)
(Bromotrifluoromethane) |
148.910 |
189 |
5.30 |
2.6 |
|
|
| |
|
|
|
|
320/660* |
SSE |
Halocarbon 14 (CF4)
(Tetrafluoromethane) |
88.005 |
-- |
3.038 |
4.39 |
|
|
| Electronic |
|
|
|
|
320/660* |
HPE |
| Semiconductor Purity |
|
|
|
|
320/580* |
HPE |
| Ultraplus™ |
|
|
|
|
320/660* |
HPE |
| VLSI |
|
|
|
|
580 |
HPE |
Halocarbon 21 (CHCl2F)
(Dichlorofluoromethane) |
102.923 |
8.4 |
3.82 at 68°F |
3.5 |
|
|
| |
|
|
|
|
660 |
MV5700 Series |
Halocarbon 22 (CHClF2)
(Chlorodifluoromethane) |
86.469 |
123 |
3.08 |
4.4 |
|
|
| |
|
|
|
|
660 |
SSE |
Halocarbon 23 (CHF3)
(Trifluoromethane) |
70.014 |
635 |
2.43 |
5.5 |
|
|
| Technical |
|
|
|
|
660 |
SSD |
| Ultraplus™ |
|
|
|
|
320/660* |
HPD |
| 99.90% |
|
|
|
|
320/660* |
LABD |
Halocarbon 114 (C2Cl2F4)
(1,2-Dichlorotetrafluoroethane) |
170.922 |
12.9 |
5.93 at 77°F |
2.3 |
|
|
| |
|
|
|
|
660 |
SSE |
Halocarbon 115 (C2ClF5)
(Chloropentafluoroethane) |
154.467 |
102 |
5.569 |
2.4 |
|
|
| |
|
|
|
|
660 |
SSE |
Halocarbon 116 (C2F6)
(Hexafluoroethane) |
138.012 |
430.3 |
4.773 |
2.8 |
|
|
| 99.90% |
|
|
|
|
320/660* |
LABD |
| Semiconductor Purity |
|
|
|
|
660 |
HPD |
Halocarbon 142B (C2H3ClF2)
(1-Chloro-1,1-Difluoroethane) |
100.496 |
27.8 |
3.63 |
3.68 |
|
|
| |
|
|
|
|
510 |
SSE |
Halocarbon 152A (C2H4F2)
(1,1-Difluoroethane) |
66.051 |
63 |
2.36 |
5.85 |
|
|
| |
|
|
|
|
510 |
SSE |
Halocarbon C-318 (C4F8)
(Octafluorocyclobutane) |
200.031 |
25 |
7.33 |
1.85 |
|
|
| |
|
|
|
|
660 |
SSE |
Halocarbon 500
(73.8 wt.% Halocarbon 12
26.2 wt.% Halocarbon 152A) |
100.1 |
82.3 |
3.5 |
3.82 |
|
|
| |
|
|
|
|
660/510* |
SSE |
Halocarbon 502
(48.8 wt.% Halocarbon 22
51.2 wt.% Halocarbon 115) |
111.63 |
132.2 |
3.87 |
3.45 |
|
|
| |
|
|
|
|
320/660* |
SSE |
Halocarbon 503
(60 wt.% Halocarbon 23
40 wt.% Halocarbon 13) |
87.247 |
613 |
3.07 |
4.3 |
|
|
| |
|
|
|
|
320 |
SSD |
Halocarbon 1113 (C2ClF3)
(Chlorotrifluoroethylene) |
116.47 |
62 |
4.13 |
3.30 |
|
|
| |
|
|
|
|
510 |
SSE |
Halocarbon 1132A (C2H2F2)
(1,1-Difluoroethylene) |
64.035 |
518 |
2.21 at 77°F |
6.0 |
|
|
| |
|
|
|
|
350 |
SSD |
| Helium (He) |
4.003 |
-- |
0.138 |
96.7 |
|
|
| Carrier Grade |
|
|
|
|
580 |
LABE/HPE |
| Chromatographic |
|
|
|
|
580 |
HPE |
| ECD Grade |
|
|
|
|
580 |
HPE |
| Grade 6™ |
|
|
|
|
580 |
HPE |
| High Pressure (3500 psig) |
|
|
|
|
680 |
AG3850 Series |
| High Pressure (6000 psig) |
|
|
|
|
677 |
SG3600 or SG3610 |
| High Purity |
|
|
|
|
580 |
LABE |
| Oxygen Free |
|
|
|
|
580 |
LABE/HPE |
| Research |
|
|
|
|
580 |
HPD |
| Semiconductor Purity |
|
|
|
|
580 |
HPE |
| Ultra High Purity |
|
|
|
|
580 |
HPE |
| Ultraplus™ |
|
|
|
|
580 |
HPE |
| Ultra Pure Carrier |
|
|
|
|
580 |
HPE |
| ULSI |
|
|
|
|
580 |
HPE |
| USP |
|
|
|
|
580/930* |
AG3660 Series |
| Zero |
|
|
|
|
580 |
LABE/HPE |
| Hexafluoropropylene (C3F6) |
150.023 |
85 |
5.18 at 68°F |
2.58 |
|
|
| |
|
|
|
|
660 |
LABD |
| Hydrogen (H2) |
2.016 |
-- |
0.0696 |
191.7 |
|
|
| Carrier Grade |
|
|
|
|
350 |
LABE/HPE |
| Extra Dry |
|
|
|
|
350 |
LABE |
| High Pressure (3500 psig) |
|
|
|
|
695 |
AG3850 Series |
| High Pressure (6000 psig) |
|
|
|
|
703 |
SG3610 |
| High Purity |
|
|
|
|
350 |
LABE |
| Prepurified |
|
|
|
|
350 |
LABE |
| Purified |
|
|
|
|
350 |
LABE |
| Research |
|
|
|
|
350 |
HPD |
| Semiconductor Purity |
|
|
|
|
350 |
HPE |
| ULSI Purity |
|
|
|
|
350 |
HPE |
| Ultra High Purity |
|
|
|
|
350 |
HPE |
| Ultraplus™ |
|
|
|
|
350 |
HPE |
| Ultra Pure Carrier |
|
|
|
|
350 |
HPE |
| Zero |
|
|
|
|
350 |
LABE/HPE |
| Hydrogen Bromide (HBr) |
80.912 |
320 |
2.812 at 77°F |
4.8 |
|
|
| Grade 2.8™ |
|
|
|
|
330 |
APC |
| ULSI Purity |
|
|
|
|
330 |
APC |
| Hydrogen Chloride (HCl) |
36.461 |
613 |
1.268 at 68°F |
10.6 |
|
|
| Electronic |
|
|
|
|
330 |
AG3870 Series |
| Research |
|
|
|
|
330 |
AG3870 Series |
| Technical |
|
|
|
|
330 |
CRH/ASB |
| ULSI Purity |
|
|
|
|
330 |
AG3870 Series |
| Ultra High Purity |
|
|
|
|
330 |
CRH/ASB |
| Hydrogen Selenide (H2Se) |
80.976 |
124.9 |
2.80 at 77°F |
4.8 |
|
|
| Research |
|
|
|
|
660 |
AG3870 Series |
| Semiconductor Purity |
|
|
|
|
350 |
AG3870 Series |
| ULSI Purity |
|
|
|
|
350 |
AG3870 Series |
| Hydrogen Sulfide (H2S) |
34.076 |
252 |
1.189 at 59°F |
11.23 |
|
|
| CP |
|
|
|
|
330 |
APC |
| Research |
|
|
|
|
330 |
APC |
| Technical |
|
|
|
|
330 |
ARG |
| Isobutane (C4H10) |
58.124 |
30.7 |
2.01 |
6.5 |
|
|
| CP |
|
|
|
|
510 |
SSE |
| Instrument |
|
|
|
|
510 |
LABD |
| Research |
|
|
|
|
510 |
HPD |
| Technical |
|
|
|
|
510 |
SSE |
| Isobutylene (C4H8) |
56.108 |
24.3 |
1.997 |
6.7 |
|
|
| CP |
|
|
|
|
510 |
SSE |
| High Purity |
|
|
|
|
510 |
SSE |
| Research |
|
|
|
|
510 |
HPD |
| Isopentane (C5H12) |
72.151 |
-3.2 |
2.48 |
-- |
|
|
| CP |
|
|
|
|
510 |
MV5700 Series |
| Krypton (Kr) |
83.800 |
-- |
2.899 |
4.6 |
|
|
| Purified |
|
|
|
|
580 |
HPE |
| Research |
|
|
|
|
580 |
HPD |
| Methane (CH4) |
16.043 |
-- |
0.554 at 32°F |
23.7 |
|
|
| Commercial |
|
|
|
|
350 |
TSD |
| CP |
|
|
|
|
350 |
LABE |
| High Pressure (3500 psig) |
|
|
|
|
695 |
AG3850 Series |
| High Pressure (6000 psig) |
|
|
|
|
703 |
SG3610 |
| Instrument |
|
|
|
|
350 |
LABE |
| Purified |
|
|
|
|
350 |
LABE |
| Research |
|
|
|
|
350 |
HPD |
| Technical |
|
|
|
|
350 |
TSD |
| Ultra High Purity |
|
|
|
|
350 |
HPE |
| Ultra Pure |
|
|
|
|
350 |
HPE |
| Methyl Bromide (CH3Br) |
94.939 |
13 |
3.355 at 77°F |
4.1 |
|
|
| |
|
|
|
|
330/320* |
LABD |
| Methyl Chloride (CH3Cl) |
50.488 |
58.7 |
1.74 at 32°F |
7.6 |
|
|
| |
|
|
|
|
510/660* |
LABD |
| Methyl Mercaptan (CH3SH) |
48.107 |
15 |
1.66 at 68°F |
8.0 |
|
|
| |
|
|
|
|
330 |
APC |
| Monomethylamine (CH3NH2) |
31.058 |
28.8 |
1.08 at 68°F |
12.1 |
|
|
| |
|
|
|
|
705 |
CRH |
| Natural Gas |
17.656 |
-- |
0.55 |
24 |
|
|
| |
|
|
|
|
350 |
TSD |
| Neon (Ne) |
20.183 |
-- |
0.696 |
19.2 |
|
|
| CP |
|
|
|
|
580 |
LABE |
| First Run |
|
|
|
|
580 |
TSD |
| High Purity |
|
|
|
|
580 |
HPE |
| Research |
|
|
|
|
580 |
HPD |
| Ultra High Purity |
|
|
|
|
580 |
HPE |
| Ultra Pure |
|
|
|
|
580 |
HPE |
| Nitric Oxide (NO) |
30.006 |
-- |
1.04 |
1.04 |
|
|
| CP |
|
|
|
|
660 |
CRH |
| Nitrogen (N2) |
28.013 |
-- |
0.967 |
13.8 |
|
|
| ECD Grade |
|
|
|
|
580 |
HPE |
| Extra Dry |
|
|
|
|
580 |
LABE |
| Grade 6™ |
|
|
|
|
580 |
HPE |
| High Pressure (3500 psig) |
|
|
|
|
680 |
AG3850 Series |
| High Pressure (6000 psig) |
|
|
|
|
677 |
SG3600 or SG3610 |
| High Purity |
|
|
|
|
580 |
LABE |
| Low Oxygen |
|
|
|
|
580 |
LABE |
| NF--High Purity |
|
|
|
|
580/960* |
AG3660 Series |
| Oxygen Free |
|
|
|
|
580 |
LABE/HPE |
| Prepurified |
|
|
|
|
580 |
LABE |
| Research |
|
|
|
|
580 |
HPD |
| Semiconductor Purity |
|
|
|
|
580 |
HPE |
| Ultra High Purity |
|
|
|
|
580 |
HPE |
| Ultraplus™ |
|
|
|
|
580 |
HPE |
| Ultra Pure Carrier |
|
|
|
|
580 |
HPE |
| Ultra Zero Ambient Monitoring Zero |
|
|
|
|
580 |
HPE |
| Vehicle Emission Zero |
|
|
|
|
580 |
HPE |
| VOC Free Nitrogen |
|
|
|
|
580 |
HPE |
| Zero |
|
|
|
|
580 |
LABE/HPE |
| Nitrogen Dioxide (NO2) |
46.005 |
0.0 psig |
1.58 |
4.7 |
|
|
| CP |
|
|
|
|
660 |
MV5800 Series |
| Nitrous Oxide (N2O) |
44.013 |
745 |
1.53 at 68°F |
8.7 |
|
|
| Atomic Absorption |
|
|
|
|
326 |
SG9011 |
| CP |
|
|
|
|
326 |
SG9011 |
| Electronic Grade |
|
|
|
|
326 |
HPD |
| High Purity |
|
|
|
|
326 |
LABD |
| Industrial |
|
|
|
|
326 |
SG9011 |
| Research |
|
|
|
|
326 |
HPD |
| Semiconductor Purity |
|
|
|
|
326 |
HPD |
| SFC Purity |
|
|
|
|
326 |
MV5700 Series |
| Technical |
|
|
|
|
326 |
SG9011 |
| Ultra High Purity |
|
|
|
|
326 |
HPD |
| Ultraplus™ |
|
|
|
|
326 |
HPD |
| USP |
|
|
|
|
326/910* |
AG3660 Series |
| Oxygen (O2) |
32.00 |
-- |
1.105 at 77°F |
12.1 |
|
|
| Extra Dry |
|
|
|
|
540 |
LABE |
| Grade 5™ |
|
|
|
|
540 |
LABE |
| Hydrocarbon Free UHP |
|
|
|
|
540 |
HPE |
| MOS |
|
|
|
|
540 |
HPE |
| Research |
|
|
|
|
540 |
HPD |
| Ultra High Purity |
|
|
|
|
540 |
HPE |
| Ultra Pure Carrier |
|
|
|
|
540 |
HPE |
| Ultra Zero |
|
|
|
|
540 |
HPE |
| USP |
|
|
|
|
540/870* |
AG3660 Series |
| Zero |
|
|
|
|
540 |
LABE/HPE |
| Perfluoropropane (C3F8) |
188.020 |
100.1 |
6.69 at 68°F |
2.02 |
|
|
| Semiconductor Purity |
|
|
|
|
660 |
HPD |
| Phosgene (COCl2) |
98.916 |
10.7 |
3.48 at 77°F |
3.9 |
|
|
| |
|
|
|
|
660 |
MV5800 Series |
| Phosphine (PH3) |
33.998 |
593 |
1.184 |
11.4 |
|
|
| Electronic |
|
|
|
|
350/632* |
AG3870 Series |
| ULSI Purity |
|
|
|
|
350/632* |
AG3870 Series |
| Phosphorous (PF5) |
125.966 |
400 |
4.46 |
3.1 |
|
|
| Pentafluoride |
|
|
|
|
330/660* |
AG3870 Series |
| Propane (C3H8) |
44.097 |
109 |
1.55 at 68°F |
8.5 |
|
|
| CP |
|
|
|
|
510 |
LABD |
| Instrument |
|
|
|
|
510 |
LABD |
| Natural |
|
|
|
|
510 |
SSE |
| Research |
|
|
|
|
510 |
HPD |
| Propylene (C3H6) |
42.081 |
136.6 |
1.48 at 68°F |
9.06 |
|
|
| CP |
|
|
|
|
510 |
LABD |
| Polymer Purity |
|
|
|
|
510 |
LABD |
| Research |
|
|
|
|
510 |
HPD |
| Silane (SiH4) |
32.118 |
-- |
1.114 |
12.0 |
|
|
| Electronic |
|
|
|
|
350/632* |
SG3862 or SG3865 |
| Nitride |
|
|
|
|
350 |
SG3862 or SG3865 |
| Semiconductor Purity |
|
|
|
|
350/632* |
SG3862 or SG3865 |
| Solar/VLSI |
|
|
|
|
350 |
SG3862 or SG3865 |
| ULSI Purity |
|
|
|
|
7350/632* |
SG3862 or SG3865 |
| Ultraplus™ |
|
|
|
|
350/632* |
SG3862 or SG3865 |
| Silicon Tetrafluoride (SiF4) |
104.080 |
-- |
3.63 at 68°F |
3.7 |
|
|
| Semiconductor Purity |
|
|
|
|
330 |
APC |
| Sulfur Dioxide (SO2) |
64.063 |
34.4 |
2.262 |
5.9 |
|
|
| Anhydrous |
|
|
|
|
660 |
APC |
| Commercial |
|
|
|
|
660 |
ARG |
| Sulfur Hexafluoride (SF6) |
146.051 |
320 |
5.11 at 68°F |
2.5 |
|
|
| Commercial |
|
|
|
|
590 |
LABD |
| CP |
|
|
|
|
590 |
LABD |
| Electronic |
|
|
|
|
590 |
HPD |
| Etchant |
|
|
|
|
590 |
HPD |
| Grade 3™ |
|
|
|
|
590 |
LABD |
| Grade 4™ |
|
|
|
|
590 |
LABD |
| Instrument Purity |
|
|
|
|
590 |
LABD |
| SFC |
|
|
|
|
590 |
MV5700 Series |
| ULSI Purity |
|
|
|
|
590 |
HPD |
| Ultraplus™ |
|
|
|
|
590 |
HPD |
| Sulfur Tetrafluoride (SF4) |
108.058 |
140 |
3.783 at 68°F |
3.6 |
|
|
| Technical |
|
|
|
|
330 |
CRH |
| Trimethylamine (C3H9N) |
59.112 |
13.3 |
2.087 at 68°F |
6.4 |
|
|
| |
|
|
|
|
705 |
CRH |
| Vinyl Methyl Ether (C3H6O) |
58.080 |
10.6 |
1.99 at 68°F |
6.7 |
|
|
| |
|
|
|
|
290 |
MV5800 Series |
| Xenon (Xe) |
131.300 |
-- |
4.560 |
2.9 |
|
|
| Purified |
|
|
|
|
580 |
HPE |
| Research |
|
|
|
|
580 |
HPD |
|