Advanced Specialty Gas Equipment

Stainless Steel Two-Stage Regulator Model AGD
STAINLESS STEEL REGULATORS
Model AGD

Ultra High Purity, Positive Seal (Tied Seat), Two-Stage Regulators

The Model AGD regulator is designed for use with ultra high purity, corrosive gases, such as those used in semiconductor manufacturing. This regulator features convoluted stainless steel diaphragms and tied seats (tied diaphragms) in both stages providing for greater sensitivity and sealing integrity. The two-stage design provides constant outlet pressure regardless of changes in cylinder (inlet) pressure.


Standard Features
  • Tied Seats in both stages ensure positive shutoff if particulate matter should lodge in the seat, a common problem with corrosive gases.
  • 1⁄16" NPT Female Bonnet Vent Ports and Stem Packing allow for complete capturing of bonnets when connected to a vent line or disposal system.
  • Two-Stage Regulator Design ensures constant delivery pressure over varying inlet pressures.
  • Type 316 Stainless Steel Bar Stock Construction provides maximum corrosion resistance.
  • Metal to Metal Diaphragm to Body Seal (without back-up o-ring) assures maximum diffusion resistance.
  • High Purity Regulator Design permits vacuum purging of regulator.
  • Diaphragm Seal Outlet Valve maintains gas purity.
  • Filter traps foreign matter, extends regulator life and reduces maintenance.
Optional Features
  • Mounting Ring permits regulator to be panel mounted.
  • Internal (Inboard) Helium Leak Test and Test Report determines inboard leak rate of gas from regulator to atmosphere; test report certifies leak rate of less than 2 x 10–8 sccs air equivalent.
  • External (Outboard) Helium Leak Test and Test Report determines outboard leak rate of gas from regulator to atmosphere; test report certifies leak rate of less than 5 x 10–7 sccs air equivalent.
Specifications
Maximum Inlet Pressure:
  AGD-3: 3000 psig
  AGD-2: 800 psig

Inlet Pressure Gauge

Delivery Pressure Range

Delivery Pressure Gauge

Filter: 40 micron

Gauge Size: 2" Dial

Operating Temp. Range: -40°F to 140°F

Flow Coefficient:
  Regulator: Cv = 0.05
  Outlet Valve: Cv = 0.17

Bonnet Vent Connection: 1⁄16" NPT female

Inlet Connection: CGA 320, 326, 330,
350, 580, 660 or 705 as ordered

Outlet Connection:   1⁄4" NPT female

Supply Pressure Effect: 0.06 psi per 100 psi

Approximate Weight: 4 lbs

Materials of Construction
Body and Outlet Valve: Type 316 Stainless Steel Bar Stock
Gauges: Type 316 Stainless Steel
Bonnet: 300 Series Stainless Steel
Other Metal Parts Exposed to Gas: Type 316 Stainless Steel
Seats: PCTFE
Friction Sleeve: PTFE
Diaphragm: Type 316 Stainless Steel

Optional Equipment

Equipment Part No.
Panel Mounting Ring* PM3803
Regulator Mounting Plate* RP1
Inboard Helium Leak Test and Test Report HT1000
Outboard Helium Leak Test and Test Report HT1001
Compression Fittings* (male connectors)  
  1⁄4" NPT male x 1⁄8" compression SG6713
  1⁄4" NPT male x 1⁄4" compression SG6714
  1⁄4" NPT male x 1⁄4" VCR® male SG6960
  1⁄16" NPT male x 1⁄8" compression SG6715
Safety Mounting Brackets*  
Purge Assemblies* (cross purge assemblies are recommended)
* If selected, these items are not installed on the regulator. They are shipped as separate items.
To order regulator with optional quick mount assembly, suffix regulator part number with QM. Example: AGD-3-75-330-QM. One 30” all stainless steel flexible hose with check valve — CGA connection will be included with each quick mount assembly.

Table I

Part No. Inlet Pressure   Delivery Pressure
Gauge (dual scale)   Range Gauge (dual scale)
(psig) (bar)   (psig) (psig) (bar)
AGD-3-30-(CGA) 0–4000 0–275   2–30 -30" Hg–0–60 -1–0–4
AGD-3-75-(CGA) 0–4000 0–275   4–75 -30" Hg–0–100 -1–0–7
AGD-3-150-(CGA) 0–4000 0–275   10–150 -30" Hg–0–200 -1–0–14
AGD-2-30-(CGA) 0–1000 0–69   2–30 -30" Hg–0–60 -1–0–4
AGD-2-75-(CGA) 0–1000 0–69   4–75 -30" Hg–0–100 -1–0–7
AGD-2-150-(CGA) 0–1000 0–69   10–150 -30" Hg–0–200 -1–0–14
Where “(CGA)” is indicated above, insert appropriate Compressed Gas Association connection number to complete the part number. Example: AGD-3-30-330. Order by complete part number.